Models of Cathode Sheath in Low-Pressure Glow
Abstract: A brief review of cathode sheath models and some defects of them are described. The conventional theories of the cathode sheath in the glow mode are based on collisional sheath in which the electron multiplication is essential process and hence they contain some principal problems to be solved, when we will derive theself-consistent solution. We propose a new concept for comprehensive treatment of the cathode sheath in the cold- and hot- cathode discharges. The new concept is based on the collisionless sheath model and plasma balance equations. In addition, tow-component velocity distribution of ions is introduced for the explanation of linearly varying field in the normal glow mode. The new concept makes it possible to clarify the structure of cathode sheath in both the cold- and the hot- cathode discharges.
Reported on the Topical Lectures of XXX|V ICPIG, Nagoya Japan
従来の冷陰極シース理論の見直し.冷,熱両陰極シースに対応可能なモデルを提案.
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